Recovering doping profiles in semiconductor devices with the Boltzmann-Poisson model

نویسندگان

  • Yingda Cheng
  • Irene M. Gamba
  • Kui Ren
چکیده

We investigate numerically an inverse problem related to the Boltzmann-Poisson system of equations for transport of electrons in semiconductor devices. The objective of the (ill-posed) inverse problem is to recover the doping profile of a device, presented as source function in the mathematical model, from its current-voltage characteristics. To reduce the degree of ill-posedness of the inverse problem, we proposed to parameterize the unknown doping profile function to limit the number of unknowns in the inverse problem. We showed by numerical examples that the reconstruction of a few low moments of the doping profile is possible when relatively accurate time-dependent or time-independent measurements are available, even though the later reconstruction is less accurate than the former. We also compare reconstructions from the BoltzmannPoisson (BP) model to those from the classical drift-diffusion-Poisson (DDP) model, assuming that measurements are generated with the BP model. We show that the two type of reconstructions can be significantly different in regimes where drift-diffusionPoisson equation fails to model the physics accurately. However, when noise presented in measured data is high, no difference in the reconstructions can be observed.

برای دانلود رایگان متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Kinetic effects on the transport properties of nanostructured devices investigated by deterministic solutions of the Boltzmann-Poisson system

In highly integrated semiconductor devices, the scale length of individual components is comparable with the distance between successive scattering events of the carriers. An accurate description of the charge transport in such regimes requires the treatment on a kinetic level. Sophisticated kinetic transport models are based on semiconductor Boltzmann equations (BE) coupled with the Poisson eq...

متن کامل

Impact of Super-Steep-Retrograde Channel Doping Profiles on the Performance of Scaled Devices

Super-steep retrograded (SSR) channels were compared to uniformly doped (UD) channels as devices are scaled down from 250 nm to the 50 nm technology node, according to the scheme targeted by the National Technology Roadmap for Semiconductors (1997). The comparison was done at the same gate length Lgate and the same off-state leakage current Io , where it was found that SSR profiles always have ...

متن کامل

A parallel monotone iterative method for the numerical solution of multi-dimensional semiconductor Poisson equation

Various self-consistent semiconductor device simulation approaches require the solution of Poisson equation that describes the potential distribution for a specified doping profile (or charge density). In this paper, we solve the multi-dimensional semiconductor nonlinear Poisson equation numerically with the finite volume method and the monotone iterative method on a Linux-cluster. Based on the...

متن کامل

Simulation of electrically tunable semiconductor nanopores for ion current/single bio-molecule manipulation

We show that a semiconductor membrane made of two thin layers of opposite (nand p-) doping can perform electrically tunable ion current rectification and filtering in a nanopore. Our model is based on the solution of the 3D Poisson equation for the electrostatic potential in a double-cone nanopore, combined with a transport model. It predicts that for appropriate biasing of the membraneelectrol...

متن کامل

Monotone Iterative Method for Parallel Numerical Solution of 3D Semiconductor Poisson Equation

Various self-consistent semiconductor device equations, such as drift diffusion, hydrodynamic and Boltzmann transport equations require solution of a multi-dimensional Poisson’s equation that describes the potential distribution in the device for a specified doping profile. In this paper, a three-dimensional semiconductor nonlinear Poisson’s equation is solved numerically with finite volume and...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

عنوان ژورنال:
  • J. Comput. Physics

دوره 230  شماره 

صفحات  -

تاریخ انتشار 2011